TIPO Releases "Trend Study on Wastewater Treatment and Recycling Technology for Semiconductor Process Equipment Patents" to Support Green Transition

The supply strategies and water treatment technologies used by the high-tech industry are receiving increasing attention. In light of Taiwan's semiconductor industry's efforts to manage water resources, the Taiwan Intellectual Property Office (TIPO) has been focusing on developing technologies related to wastewater recycling and water resource regeneration. Today (25th), TIPO released a project report titled "Patent Trend Study on Wastewater Treatment and Recycling Technology for Semiconductor Process Equipment." The report explores key technologies and patent trends in semiconductor wastewater treatment, providing vital references for the industry in advancing green transformation, circular economy, ESG development, and achieving the 2050 net-zero emissions target.

TIPO noted that the global semiconductor industry has made significant progress in sustainable water resource development through wastewater recycling and water resource regeneration technologies. As a major international producer of semiconductor components, Taiwan boasts a well-established industrial chain and technological foundation, with research and development achievements comparable to advanced nations such as the United States, Japan, and Europe. Institutions like the Industrial Technology Research Institute (ITRI) and semiconductor-related industries such as Taiwan Semiconductor Manufacturing Co. (TSMC) and Mega Union Technology Incorporated actively develop wastewater recycling and water resource regeneration technologies. These efforts reduce dependence on natural water resources and create economic benefits, further promoting the development of the circular economy.

According to the report, over the past 60 years, the patent filings for "wastewater recycling" and "water resource regeneration" technologies in the semiconductor industry have shown a trend of significant growth, followed by steady development. This trend can be categorized into 5 phases: the Emergence Phase (1970–1997), the Development Phase (1997–2011), the Slight Decline Phase (2012–2014), the Recovery and Redevelopment Phase (2015–2018), and the Saturated and Stable Development Phase (2019–2023).

In terms of industrial trends, each country's industrial structures differ. Advanced countries like Europe, the United States, and Japan have long-established large-scale companies in electronics, water purification equipment, or related materials manufacturing, with R&D investment dating back to around 1970. Research institutions and smaller companies are relatively rare. Among the top 20 global patent applicants, 60% are from Japan, all being well-known large multinational corporations, and their patent filing numbers remain impressive. Although China started later (around 1997), with encouragement and subsidies from national policies, small and start-up companies have flourished since 2005, leading to a rapid increase in patent filings for relevant technologies.

Taiwan, as a major player in semiconductor manufacturing, has a complete industrial chain and a solid corporate culture. In recent years, the country's focus on ESG, sustainable development, and the circular economy has prompted leading semiconductor companies to adopt waste recycling and reuse principles for both implementation and technology development. Wastewater recycling and water resource regeneration technologies are key areas of focus. Taiwan’s development model is primarily led by large semiconductor companies collaborating with domestic firms and academic institutions, achieving commendable results.

The report concludes by analyzing key technologies in semiconductor wastewater treatment, noting that such technologies often rely on a combination of methods rather than a single technique to achieve wastewater treatment and water resource regeneration. These technologies can be broadly categorized into physical, chemical, and biological treatments based on the reaction types. Physical and chemical treatment methods have earlier development timelines, with more institutions involved and more patent filings. The leading technologies currently in use include Reverse Osmosis (RO), Microfiltration (MF), Ultrafiltration (UF), Nano-Filtration, Advanced Oxidation Processes (AOP), Coagulating-Sedimentation (CS), and Ion Exchange Chromatography (IEC).

In biological treatment, technologies leverage the characteristics of microorganisms to degrade and convert pollutants in wastewater into harmless substances, making large-scale and low-cost treatment possible. This offers significant economic value and has become a primary focus of R&D in industries worldwide. Key technologies include High Performance Activity Sludge (HPAS) and Membrane Bio-Reactor (MBR). As artificial intelligence (AI) technologies mature, their application in the control, monitoring, and detection of treatment systems is expected to increase in importance, with a corresponding rise in patent filings. Future developments in this area warrant close attention.

As global demand for semiconductor products continues to rise, companies should innovate with green technologies to enhance competitiveness, achieve the 2050 net-zero transformation goal, and pursue sustainable development.